All-nitride superconducting qubits based on atomic layer deposition

Quantum Physics arXiv:2511.08931 (quant-ph) [Submitted on 12 Nov 2025] Title:All-nitride superconducting qubits based on atomic layer deposition Authors:Danqing Wang, Yufeng Wu, Naomi Pieczulewski, Prachi Garg, Manuel C. C. Pace, C. G. L. Bøttcher, Baishakhi Mazumder, David A. Muller, Hong X. Tang View a PDF of the paper titled All-nitride superconducting qubits based on atomic layer deposition, by Danqing Wang and 8 other authors View PDF HTML (experimental) Abstract:The development of large-scale quantum processors benefits from superconducting qubits that can operate at elevated temperatures and be fabricated with scalable, foundry-compatible processes. Atomic layer deposition (ALD) is increasingly being adopted as an industrial standard for thin-film growth, particularly in applications requiring precise control over layer thickness and composition. Here, we report superconducting qubits based on NbN/AlN/NbN trilayers deposited entirely by ALD. By varying the number of ALD cycles used to form the AlN barrier, we achieve Josephson tunneling through barriers of different thicknesses, with critical current density spanning seven orders of magnitude, demonstrating the uniformity and versatility of the process. Owing to the high critical temperature of NbN, transmon qubits based on these all-nitride trilayers exhibit microsecond-scale relaxation times, even at temperatures above 300 mK. These results establish ALD as a viable low-temperature deposition technique for superconducting quantum circuits and position all-nitride ALD qubits as a promising platform for operation at elevated temperatures. Comments: Subjects: Quantum Physics (quant-ph) Cite as: arXiv:2511.08931 [quant-ph] (or arXiv:2511.08931v1 [quant-ph] for this version) https://doi.org/10.48550/arXiv.2511.08931 Focus to learn more arXiv-issued DOI via DataCite (pending registration) Submission history From: Danqing Wang [view email] [v1] Wed, 12 Nov 2025 03:15:52 UTC (16,548 KB) Full-text links: Access Paper: View a PDF of the paper titled All-nitride superconducting qubits based on atomic layer deposition, by Danqing Wang and 8 other authorsView PDFHTML (experimental)TeX Source view license Current browse context: quant-ph new | recent | 2025-11 References & Citations INSPIRE HEP NASA ADSGoogle Scholar Semantic Scholar export BibTeX citation Loading... BibTeX formatted citation × loading... Data provided by: Bookmark Bibliographic Tools Bibliographic and Citation Tools Bibliographic Explorer Toggle Bibliographic Explorer (What is the Explorer?) Connected Papers Toggle Connected Papers (What is Connected Papers?) Litmaps Toggle Litmaps (What is Litmaps?) scite.ai Toggle scite Smart Citations (What are Smart Citations?) Code, Data, Media Code, Data and Media Associated with this Article alphaXiv Toggle alphaXiv (What is alphaXiv?) Links to Code Toggle CatalyzeX Code Finder for Papers (What is CatalyzeX?) DagsHub Toggle DagsHub (What is DagsHub?) GotitPub Toggle Gotit.pub (What is GotitPub?) Huggingface Toggle Hugging Face (What is Huggingface?) Links to Code Toggle Papers with Code (What is Papers with Code?) ScienceCast Toggle ScienceCast (What is ScienceCast?) Demos Demos Replicate Toggle Replicate (What is Replicate?) Spaces Toggle Hugging Face Spaces (What is Spaces?) Spaces Toggle TXYZ.AI (What is TXYZ.AI?) Related Papers Recommenders and Search Tools Link to Influence Flower Influence Flower (What are Influence Flowers?) Core recommender toggle CORE Recommender (What is CORE?) Author Venue Institution Topic About arXivLabs arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs. Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)