Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes
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Quantum Physics arXiv:2604.22086 (quant-ph) [Submitted on 23 Apr 2026] Title:Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes Authors:Ekta Bhatia, Yingge Du, Krishna P Koirala, Chung Kow, Mingzhao Liu, Juan Macy, Tharanga R. Nanayakkara, Francisco Ponce, Satyavolu S. Papa Rao, Drew J. Rebar, Peter V. Sushko, Brent A VanDevender, Chongmin Wang, Marvin G. Warner, Zhihao Xiao View a PDF of the paper titled Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes, by Ekta Bhatia and 14 other authors View PDF HTML (experimental) Abstract:Surface oxides contribute to losses in superconducting transmon devices resulting in degraded performance. We explore the use of the damascene process to replace the sidewall native oxide of a device with a metal/substrate interface. We simulate sidewall oxidation by burying an oxide layer during fabrication. We observe a modest improvement between the two types of devices, which is suggestive of a reduction in the surface participation ratio. Subjects: Quantum Physics (quant-ph); Materials Science (cond-mat.mtrl-sci) Report number: PNNL-SA-222047 Cite as: arXiv:2604.22086 [quant-ph] (or arXiv:2604.22086v1 [quant-ph] for this version) https://doi.org/10.48550/arXiv.2604.22086 Focus to learn more arXiv-issued DOI via DataCite (pending registration) Submission history From: Francisco Ponce [view email] [v1] Thu, 23 Apr 2026 21:38:51 UTC (28,491 KB) Full-text links: Access Paper: View a PDF of the paper titled Tantalum Damascene Coplanar Waveguide Resonators Fabricated Using 300 mm Scale Processes, by Ekta Bhatia and 14 other authorsView PDFHTML (experimental)TeX Source view license Current browse context: quant-ph new | recent | 2026-04 Change to browse by: cond-mat cond-mat.mtrl-sci References & Citations INSPIRE HEP NASA ADSGoogle Scholar Semantic Scholar export BibTeX citation Loading... BibTeX formatted citation × loading... Data provided by: Bookmark Bibliographic Tools Bibliographic and Citation Tools Bibliographic Explorer Toggle Bibliographic Explorer (What is the Explorer?) Connected Papers Toggle Connected Papers (What is Connected Papers?) Litmaps Toggle Litmaps (What is Litmaps?) scite.ai Toggle scite Smart Citations (What are Smart Citations?) Code, Data, Media Code, Data and Media Associated with this Article alphaXiv Toggle alphaXiv (What is alphaXiv?) Links to Code Toggle CatalyzeX Code Finder for Papers (What is CatalyzeX?) DagsHub Toggle DagsHub (What is DagsHub?) GotitPub Toggle Gotit.pub (What is GotitPub?) Huggingface Toggle Hugging Face (What is Huggingface?) ScienceCast Toggle ScienceCast (What is ScienceCast?) Demos Demos Replicate Toggle Replicate (What is Replicate?) Spaces Toggle Hugging Face Spaces (What is Spaces?) Spaces Toggle TXYZ.AI (What is TXYZ.AI?) Related Papers Recommenders and Search Tools Link to Influence Flower Influence Flower (What are Influence Flowers?) Core recommender toggle CORE Recommender (What is CORE?) Author Venue Institution Topic About arXivLabs arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs. Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)