Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics

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Quantum Physics arXiv:2601.20025 (quant-ph) [Submitted on 27 Jan 2026] Title:Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics Authors:Jawaher Almutlaq, Alessandro Buzzi, Anders Khaykin, Linsen Li, William Yzaguirre, Maxim Sirotin, Gerald Gilbert, Genevieve Clark, Dirk Englund View a PDF of the paper titled Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics, by Jawaher Almutlaq and 8 other authors View PDF HTML (experimental) Abstract:Quantum technologies promise secure communication networks and powerful new forms of information processing, but building these systems at scale remains a major challenge. Diamond is an especially attractive material for quantum devices because it can host atomic-scale defects that emit single photons and store quantum information with exceptional stability. However, fabricating the optical structures needed to control light in diamond typically relies on slow, bespoke processes that are difficult to scale. In this work, we introduce a manufacturing approach that brings diamond quantum photonics closer to industrial production. Instead of sequentially defining each device by lithography written directly on diamond, we fabricate high-precision silicon masks using commercial semiconductor foundries and transfer them onto diamond via microtransfer printing. These masks define large arrays of nanoscale optical structures, shifting the most demanding pattern-definition steps away from the diamond substrate, improving uniformity, yield, and throughput. Using this method, we demonstrate hundreds of diamond "quantum microchiplets" with improved optical performance and controlled interaction with quantum emitters. The chiplet format allows defective devices to be replaced and enables integration with existing photonic and electronic circuits. Our results show that high-quality diamond quantum devices can be produced using scalable, foundry-compatible techniques. This approach provides a practical pathway toward large-scale quantum photonic systems and hybrid quantum-classical technologies built on established semiconductor manufacturing infrastructure. Subjects: Quantum Physics (quant-ph) Cite as: arXiv:2601.20025 [quant-ph] (or arXiv:2601.20025v1 [quant-ph] for this version) https://doi.org/10.48550/arXiv.2601.20025 Focus to learn more arXiv-issued DOI via DataCite (pending registration) Submission history From: Jawaher Almutlaq [view email] [v1] Tue, 27 Jan 2026 19:58:18 UTC (17,540 KB) Full-text links: Access Paper: View a PDF of the paper titled Foundry-Enabled Patterning of Diamond Quantum Microchiplets for Scalable Quantum Photonics, by Jawaher Almutlaq and 8 other authorsView PDFHTML (experimental)TeX Source view license Current browse context: quant-ph new | recent | 2026-01 References & Citations INSPIRE HEP NASA ADSGoogle Scholar Semantic Scholar export BibTeX citation Loading... BibTeX formatted citation × loading... Data provided by: Bookmark Bibliographic Tools Bibliographic and Citation Tools Bibliographic Explorer Toggle Bibliographic Explorer (What is the Explorer?) Connected Papers Toggle Connected Papers (What is Connected Papers?) Litmaps Toggle Litmaps (What is Litmaps?) scite.ai Toggle scite Smart Citations (What are Smart Citations?) Code, Data, Media Code, Data and Media Associated with this Article alphaXiv Toggle alphaXiv (What is alphaXiv?) Links to Code Toggle CatalyzeX Code Finder for Papers (What is CatalyzeX?) DagsHub Toggle DagsHub (What is DagsHub?) GotitPub Toggle Gotit.pub (What is GotitPub?) Huggingface Toggle Hugging Face (What is Huggingface?) Links to Code Toggle Papers with Code (What is Papers with Code?) ScienceCast Toggle ScienceCast (What is ScienceCast?) Demos Demos Replicate Toggle Replicate (What is Replicate?) Spaces Toggle Hugging Face Spaces (What is Spaces?) Spaces Toggle TXYZ.AI (What is TXYZ.AI?) Related Papers Recommenders and Search Tools Link to Influence Flower Influence Flower (What are Influence Flowers?) Core recommender toggle CORE Recommender (What is CORE?) Author Venue Institution Topic About arXivLabs arXivLabs: experimental projects with community collaborators arXivLabs is a framework that allows collaborators to develop and share new arXiv features directly on our website. Both individuals and organizations that work with arXivLabs have embraced and accepted our values of openness, community, excellence, and user data privacy. arXiv is committed to these values and only works with partners that adhere to them. Have an idea for a project that will add value for arXiv's community? Learn more about arXivLabs. Which authors of this paper are endorsers? | Disable MathJax (What is MathJax?)
